Regional Adsorption Chuck Table
Mainly used for laser cutting, lighting testing, laser repair, AOI appearance inspection, and automatic handling and flipping of flexible display screens (OLEDs); The supporting equipment mainly includes laser cutting machines, AOI detection, laser repair and other equipment.
As a vacuum adsorption bearing platform, it has the characteristics of high flatness, uniform adsorption force, and stable local adsorption, and is particularly suitable for the processing and testing of flexible screens (OLEDs), small-sized wafers, and other workpieces.
A fixed size suction cup that can simultaneously handle the adsorption of different sized sheets; Surface resistance 106-109 (Ω); The reflectivity, aperture, and porosity can be customized according to non-standard requirements; The maximum size can reach 2000mm * 1000mm, with a flatness of ≤ 0.08mm.
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